Application

14969143 · METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2015-12-15 · Granted · Patent 9897925 (2018-02-20) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC G03F 7/70258 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.0 mo

to disposition 26.2 mo

Statutes raised

103

2 actions read

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