Application

14973973 · LOW DAMAGE LOW-K DIELECTRIC ETCH

Filed 2015-12-18 · Granted · Patent 10453700 (2019-10-22) The official file ↗The patent and its PDF ↗ · Art unit 2899 · Examiner Quovaunda Jefferson Hard · CPC H10P 50/73 · Texas Instruments Incorporated · TEXAS INSTRUMENTS INCORPORATED

Office actions

first was Non-final rejection

RCEs

appealed

To first action

4.8 mo

to disposition 46.1 mo

Statutes raised

102 103 DP

5 actions read

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