Application

14977720 · Temperature Controlled Ion Source

Filed 2015-12-22 · Granted · Patent 9859098 (2018-01-02) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner David E Smith Typical · CPC H01J 37/3002 · Varian Semiconductor Equipment Associates, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

16.4 mo

to disposition 24.4 mo

Statutes raised

103

1 actions read

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