Application

14979653 · SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS WITH BEAM DECELARATION

Filed 2015-12-28 · Abandoned The official file ↗ · Art unit 2881 · Examiner Jason L McCormack Typical · CPC H01J 37/05 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

4.5 mo

to disposition 28.5 mo

Statutes raised

102 103 112 DP

2 actions read

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