Application

15008519 · PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2016-01-28 · Granted · Patent 9588445 (2017-03-07) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC G02B 13/24 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

11.2 mo

to disposition 13.3 mo

Statutes raised

0 actions read

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