Application

15023936 · Charged Particle Beam Device

Filed 2016-03-22 · Granted · Patent 9697987 (2017-07-04) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Hanway Chang Typical · CPC H01J 37/28 · HITACHI HIGH-TECHNOLOGIES CORPORATION · CROWELL & MORING LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

11.1 mo

to disposition 15.4 mo

Statutes raised

0 actions read

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