Application

15054238 · Method For Determining The Registration Of A Structure On A Photomask And Apparatus To Perform The Method

Filed 2016-02-26 · Granted · Patent 10113864 (2018-10-30) The official file ↗The patent and its PDF ↗ · Art unit 2665 · Examiner Nirav G Patel Typical · CPC G01B 11/26 · Carl Zeiss Meditec AG · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

19.6 mo

to disposition 32.1 mo

Statutes raised

101 103 DP

2 actions read

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