Application

15068320 · Systems and Methods for Enhancing Inspection Sensitivity of an Inspection Tool

Filed 2016-03-11 · Granted · Patent 9747520 (2017-08-29) The official file ↗The patent and its PDF ↗ · Art unit 2668 · Examiner David F Dunphy Easy · CPC G06T 7/001 · KLA-TENCOR CORPORATION · KLA Corporation / Hodgson Russ LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

12.1 mo

to disposition 17.6 mo

Statutes raised

0 actions read

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