Application

15077439 · STAGE APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD OF POSITIONING AN OBJECT TABLE

Filed 2016-03-22 · Granted · Patent 9915880 (2018-03-13) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/70716 · ASML NETHERLANDS B.V · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.1 mo

to disposition 23.7 mo

Statutes raised

103 112 DP

1 actions read

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