Application
15092002 · METHOD FOR DOPING SOURCE AND DRAIN REGIONS OF A TRANSISTOR BY MEANS OF SELECTIVE AMORPHISATION
Filed 2016-04-06 · Granted · Patent 9966453 (2018-05-08) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner Alexander Belousov Typical · CPC H10D 30/021 · Commissariat A L'Energie Atomique et aux Energies Alternatives · OBLON, MCCLELLAND, MAIER & NEUSTADT, L.L.P.
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