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15136238 · SELF ALIGNED REPLACEMENT METAL SOURCE/DRAIN FINFET

Filed 2016-04-22 · Granted · Patent 10418450 (2019-09-17) The official file ↗The patent and its PDF ↗ · Art unit 2829 · Examiner Daniel B Whalen Typical · CPC H10D 64/017 · International Business Machines Corporation · HG Law LLP (Adeia)

Office actions
7
first was Non-final rejection
RCEs
3
no appeal
To first action
4.4 mo
to disposition 40.8 mo
Statutes raised
102 103 112
7 actions read
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