Application

15202104 · FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY

Filed 2016-07-05 · Granted · Patent 9996012 (2018-06-12) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Mesfin T Asfaw Typical · CPC G02B 26/06 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

4.8 mo

to disposition 23.2 mo

Statutes raised

102

3 actions read

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