Application

15204279 · MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM

Filed 2016-07-07 · Granted · Patent 10068765 (2018-09-04) The official file ↗The patent and its PDF ↗ · Art unit 2812 · Examiner Alexander G Ghyka Typical · CPC H10P 14/6538 · Tokyo Electron Limited · Tokyo Electron U.S. Holdings, Inc.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

0.8 mo

to disposition 25.9 mo

Statutes raised

103 DP

3 actions read

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