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15210012 · DEVICES AND METHODS OF FORMING EPI FOR AGGRESSIVE GATE PITCH

Filed 2016-07-14 · Granted · Patent 9685384 (2017-06-20) The official file ↗The patent and its PDF ↗ · Art unit 2812 · Examiner Changhyun Yi Easy · CPC H10D 84/038 · GLOBALFOUNDRIES Inc. · Heslin Rothenberg Farley & Mesiti/ GlobalFoundries

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first was Restriction requirement
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4.2 mo
to disposition 11.2 mo
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