PATLY.AIApplication
15211993 · ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
Filed 2016-07-15 · Granted · Patent 9797037 (2017-10-24) The official file ↗The patent and its PDF ↗ · Art unit 1784 · Examiner Vera Katz Hard · CPC C23C 14/088 · Applied Materials, Inc. · LOWENSTEIN SANDLER LLP / AMAT
Office actions
1
first was Restriction requirement
RCEs
0
no appeal
To first action
3.6 mo
to disposition 15.3 mo
Statutes raised
103 112 DP
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