Application

15250241 · MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

Filed 2016-08-29 · Granted · Patent 10345710 (2019-07-09) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/2041 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.4 mo

to disposition 34.3 mo

Statutes raised

102 103 112

2 actions read

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