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15270072 · WAVELENGTH-BASED OPTICAL FILTERING

Filed 2016-09-20 · Granted · Patent 10663866 (2020-05-26) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/70191 · ASML Netherlands B.V. · ASML CIP (San Diego) / DMIPG

Office actions
4
first was Non-final rejection
RCEs
1
appealed
To first action
13.6 mo
to disposition 44.2 mo
Statutes raised
102 103
4 actions read
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