Application

15277096 · PLASMA ATOMIC LAYER DEPOSITION SYSTEM AND METHOD

Filed 2016-09-27 · Abandoned The official file ↗ · Art unit 1716 · Examiner Nathan K Ford Hard · CPC C23C 16/45536 · Veeco Instruments Inc. · Steven Colby

Office actions

first was Non-final rejection

RCEs

appealed

To first action

27.8 mo

to disposition n/a

Statutes raised

103 112

2 actions read

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