Application

15277103 · VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

Filed 2016-09-27 · Granted · Patent 10209633 (2019-02-19) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/70808 · CANON KABUSHIKI KAISHA · Rossi, Kimms & McDowell LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.9 mo

to disposition 28.7 mo

Statutes raised

102 103

2 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.