Application

15284162 · Semiconductor Device, Method and Tool of Manufacture

Filed 2016-10-03 · Granted · Patent 10163642 (2018-12-25) The official file ↗The patent and its PDF ↗ · Art unit 2816 · Examiner Savitri Mulpuri Typical · CPC H10D 30/024 · Taiwan Semiconductor Manufacturing Company, Ltd. · Intellectual Property Division

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

4.9 mo

to disposition 26.7 mo

Statutes raised

102 103

3 actions read

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