Application

15287524 · LITHOGRAPHIC APPARATUS

Filed 2016-10-06 · Granted · Patent 10649341 (2020-05-12) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

15.0 mo

to disposition 43.2 mo

Statutes raised

102 103 DP

4 actions read

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