Application

15321660 · COATED FLAT COMPONENT IN A CVD REACTOR

Filed 2016-12-22 · Granted · Patent 11053586 (2021-07-06) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner Charlee Bennett Typical · CPC C23C 16/455 · AIXTRON SE · Ascenda Law Group, PC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

28.2 mo

to disposition 54.4 mo

Statutes raised

103 112

5 actions read

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