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15327326 · CLEANING COMPOSITION FOLLOWING CMP AND METHODS RELATED THERETO

Filed 2017-01-18 · Granted · Patent 10100272 (2018-10-16) The official file ↗The patent and its PDF ↗ · Art unit 1761 · Examiner Gregory E Webb Easy · CPC C11D 3/0073 · Cabot Microelectronics Corporation · Thomas Omholt

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
10.7 mo
to disposition 20.9 mo
Statutes raised
102
1 actions read
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