Application
15341240 · FINFET SPACER FORMATION ON GATE SIDEWALLS, BETWEEN THE CHANNEL AND SOURCE/DRAIN REGIONS
Filed 2016-11-02 · Granted · Patent 9806078 (2017-10-31) The official file ↗The patent and its PDF ↗ · Art unit 2898 · Examiner Mary A Wilczewski Typical · CPC H10D 84/853 · GLOBALFOUNDRIES Inc. · Heslin Rothenberg Farley & Mesiti/ GlobalFoundries
Office actions
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first was Restriction requirement
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no appeal
To first action
6.7 mo
to disposition 11.9 mo
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