PATLY.AIApplication
15346594 · OPTICAL MEASUREMENT OF STEP SIZE AND PLATED METAL THICKNESS
Filed 2016-11-08 · Granted · Patent 10359613 (2019-07-23) The official file ↗The patent and its PDF ↗ · Art unit 2488 · Examiner Philip Dang Hard · CPC G01B 11/022 · Zeta Instruments, Inc. · KLA TENCOR / IMPERIUM PATENT WORKS
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
22.2 mo
to disposition 32.4 mo
Statutes raised
103
1 actions read