Application

15346607 · OPTICAL MEASUREMENT OF BUMP HIEGHT

Filed 2016-11-08 · Granted · Patent 10168524 (2019-01-01) The official file ↗The patent and its PDF ↗ · Art unit 2488 · Examiner Philip Dang Hard · CPC G02B 21/244 · Zeta Instruments, Inc. · KLA TENCOR / IMPERIUM PATENT WORKS

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

21.5 mo

to disposition 25.8 mo

Statutes raised

0 actions read

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