Application

15363276 · APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR CLEANING GUIDE PLATE

Filed 2016-11-29 · Granted · Patent 10534265 (2020-01-14) The official file ↗The patent and its PDF ↗ · Art unit 1711 · Examiner Jason Paul Riggleman Typical · CPC G03F 7/162 · SEMES CO., LTD. · CARTER, DELUCA & FARRELL LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

21.9 mo

to disposition 37.5 mo

Statutes raised

102 112

1 actions read

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