Application

15376312 · PEAK-BASED ENDPOINTING FOR CHEMICAL MECHANICAL POLISHING

Filed 2016-12-12 · Granted · Patent 9799578 (2017-10-24) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Binh X Tran Typical · CPC H10P 74/238 · Applied Materials, Inc. · FISH & RICHARDSON P.C. (APPLIED MATERIALS)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

2.2 mo

to disposition 10.4 mo

Statutes raised

112

1 actions read

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