Application

15380121 · PELLICLE STRUCTURES AND METHODS OF FABRICATING THEREOF

Filed 2016-12-15 · Granted · Patent 10001701 (2018-06-19) The official file ↗The patent and its PDF ↗ · Art unit 1737 · Examiner Stephen D Rosasco Easy · CPC G03F 1/64 · Taiwan Semiconductor Manufacturing Co., Ltd. · Haynes and Boone, LLP (24061)

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

13.7 mo

to disposition 18.1 mo

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.