Application

15387461 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2016-12-21 · Granted · Patent 9891542 (2018-02-13) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC H10P 76/2041 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.3 mo

to disposition 13.8 mo

Statutes raised

102

1 actions read

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