Application

15402993 · REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM DEPOSITION PROCESS

Filed 2017-01-10 · Granted · Patent 11390950 (2022-07-19) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner David P Turocy Typical · CPC H10P 14/22 · ASM IP Holding B.V. · Snell & Wilmer (ASM IP Holding B.V.)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

22.6 mo

to disposition 66.2 mo

Statutes raised

102 103 112

9 actions read

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