PATLY.AIApplication
15407153 · REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE
Filed 2017-01-16 · Granted · Patent 10451890 (2019-10-22) The official file ↗The patent and its PDF ↗ · Art unit 2872 · Examiner William R Alexander Easy · CPC G02B 27/48 · ASML Netherlands B.V. · ASML CIP (San Diego) / DMIPG
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
15.6 mo
to disposition 33.1 mo
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