Application

15411015 · PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2017-01-20 · Granted · Patent 9977338 (2018-05-22) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC G02B 13/24 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.0 mo

to disposition 16.0 mo

Statutes raised

1 actions read

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