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15432263 · SELECTIVE DEPOSITION OF ALUMINUM AND NITROGEN CONTAINING MATERIAL

Filed 2017-02-14 · Granted · Patent 10121699 (2018-11-06) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner Bo Bin Jang Typical · CPC H10P 14/69391 · ASM IP Holding B.V. · Knobbe, Martens, Olson & Bear, LLP

Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
7.5 mo
to disposition 20.7 mo
Statutes raised
102 103 112
2 actions read
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