Application

15432619 · METHOD AND APPARATUS OF REMOTE PLASMAS FLOWABLE CVD CHAMBER

Filed 2017-02-14 · Abandoned The official file ↗ · Art unit 1718 · Examiner Benjamin R Kendall Typical · CPC H01J 37/32357 · Applied Materials, Inc. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

13.8 mo

to disposition 65.0 mo

Statutes raised

102 103 112

6 actions read

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