Application
15433068 · METHOD OF POLISHING GROUP III-V MATERIALS
Filed 2017-02-15 · Granted · Patent 10418248 (2019-09-17) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Roberts P Culbert Easy · CPC H10P 52/402 · Cabot Microelectronics Corporation · Thomas Omholt
Office actions
3
first was Non-final rejection
RCEs
1
no appeal
To first action
12.9 mo
to disposition 31.0 mo
Statutes raised
102 103
3 actions read