Application

15438376 · Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature

Filed 2017-02-21 · Granted · Patent 9766557 (2017-09-19) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Michelle M Iacoletti Typical · CPC G03F 7/70875 · ASML Netherlands B.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

1.8 mo

to disposition 6.9 mo

Statutes raised

0 actions read

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