Application

15466662 · FLUID DISPENSE METHODOLOGY AND APPARATUS FOR IMPRINT LITHOGRAPHY

Filed 2017-03-22 · Granted · Patent 10304690 (2019-05-28) The official file ↗The patent and its PDF ↗ · Art unit 2813 · Examiner Edward Chin Typical · CPC G03F 7/0002 · CANON KABUSHIKI KAISHA · Abel Schillinger, LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

7.8 mo

to disposition 26.2 mo

Statutes raised

102 103

2 actions read

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