Application

15483607 · EUV LITHOGRAPHY SYSTEM AND OPERATING METHOD

Filed 2017-04-10 · Granted · Patent 10073361 (2018-09-11) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70883 · ASML NETHERLANDS B.V. · EDELL, SHAPIRO & FINNAN, LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

7.6 mo

to disposition 17.1 mo

Statutes raised

103

1 actions read

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