PATLY.AIApplication
15484072 · TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
Filed 2017-04-10 · Granted · Patent 9991098 (2018-06-05) The official file ↗The patent and its PDF ↗ · Art unit 1795 · Examiner Kishor Mayekar Typical · CPC H01J 37/32449 · MKS Instruments, Inc. · CESARI AND MCKENNA, LLP
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