Application

15490598 · SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2017-04-18 · Granted · Patent 10451980 (2019-10-22) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.6 mo

to disposition 30.1 mo

Statutes raised

102 103 DP

3 actions read

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