Application

15494186 · METHOD & APPARATUS TO PREVENT DEPOSITION RATE/THICKNESS DRIFT, REDUCE PARTICLE DEFECTS & INCREASE REMOTE PLASMA SYSTEM LIFETIME

Filed 2017-04-21 · Granted · Patent 10428426 (2019-10-01) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Rudy Zervigon Easy · CPC C23C 16/50 · Applied Materials, Inc. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

25.6 mo

to disposition 29.3 mo

Statutes raised

0 actions read

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