Application

15510732 · COBALT DEPOSITION SELECTIVITY ON COPPER AND DIELECTRICS

Filed 2018-11-16 · Granted · Patent 11476158 (2022-10-18) The official file ↗The patent and its PDF ↗ · Art unit 1715 · Examiner Bret P Chen Easy · CPC H10W 20/057 · Entegris, inc. · Entegris, Inc.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

19.6 mo

to disposition 47.0 mo

Statutes raised

103 112

4 actions read

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