Application

15515110 · EXPOSURE DEVICE AND OUT-OF-FOCUS AND TILT ERROR COMPENSATION METHOD

Filed 2017-03-28 · Granted · Patent 10197923 (2019-02-05) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC G03F 7/20 · SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. · Muncy, Geissler, Olds & Lowe, P.C.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

10.1 mo

to disposition 22.3 mo

Statutes raised

102 103 112

1 actions read

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