Application

15519010 · METHOD FOR ETCHING MULTILAYER FILM

Filed 2017-04-13 · Granted · Patent 10217933 (2019-02-26) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner Tony Tran Hard · CPC H10N 50/01 · TOKYO ELECTRON LIMITED · ROTHWELL, FIGG, ERNST & MANBECK, P.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.7 mo

to disposition 22.5 mo

Statutes raised

102 103

1 actions read

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