Application

15519072 · PLASMA PROCESSING APPARATUS

Filed 2017-04-13 · Abandoned The official file ↗ · Art unit 1716 · Examiner Keath T Chen Typical · CPC H01J 37/32449 · TOKYO ELECTRON LIMITED · Weihrouch IP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

27.8 mo

to disposition 63.4 mo

Statutes raised

103 112

6 actions read

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