Application

15520326 · COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM

Filed 2017-04-19 · Granted · Patent 10106890 (2018-10-23) The official file ↗The patent and its PDF ↗ · Art unit 1715 · Examiner Bret P Chen Easy · CPC C23C 16/345 · VERSUM MATERIALS US, LLC · Versum Materials US LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

10.1 mo

to disposition 18.1 mo

Statutes raised

103 112

1 actions read

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