Application

15523140 · ADJUSTING DEVICE AND ADJUSTING METHOD FOR EXPOSURE DEVICE

Filed 2017-04-28 · Granted · Patent 10197919 (2019-02-05) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Michelle M Iacoletti Typical · CPC G03F 7/20 · SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. · Muncy, Geissler, Olds & Lowe, P.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

13.7 mo

to disposition 21.3 mo

Statutes raised

102

1 actions read

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