Application

15537214 · A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

Filed 2017-06-16 · Granted · Patent 10551748 (2020-02-04) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Michelle M Iacoletti Typical · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.2 mo

to disposition 31.6 mo

Statutes raised

102 103 112

3 actions read

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