Application

15575793 · METHODS AND SYSTEM FOR CLEANING SEMICONDUCTOR WAFERS

Filed 2017-11-20 · Granted · Patent 10910244 (2021-02-02) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Binh X Tran Typical · CPC H10P 70/20 · ACM Research (Shanghai) Inc. · K&L Gates LLP - Palo Alto

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

22.4 mo

to disposition 38.4 mo

Statutes raised

102 103 112

2 actions read

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